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Multi focus image acquisition apparatus and sample surface inspection system
Year of Patent
2018
Inventor
김민영,김병학
Nationality
Korea
Patent Number
KR101854401B1
This is for testing the sample surface focus image capture device and the sample surface inspection system is provided. Obtaining the focus image according to one embodiment of the disclosed apparatus, respectively, on the upper side of the first illumination portion, a plurality of the first surface illumination comprises a plurality of first side illumination arrangement relative to the sample placement in different directions change the light incident angle to the sample, the sample in the second illumination portion, the upper direction of a sample placed position comprising a plurality of second side illumination arrangement recordable camera and the first illuminating and flashing a second lighting unit in sequence, and by controlling the camera to take a sample, and may include a processor to obtain a plurality of images of different focal length.

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