A method for generating the height information of a substrate inspecting device is provided to obtain an accurate height, high resolution, and a high inspection speed by combining lattice images or height information to generate the final height. CONSTITUTION: A first image and a second image of a sample for correction are obtained(S110). The first image is matched with the second image based on the overlay region of a first region and a second region(S120). A position relation between the first image and the second image is obtained(S130). Combined height information is generated by combining a first lattice image corresponding to the first region with a second lattice image corresponding to the second region(S140). [Reference numerals] (AA) Start; (BB) End; (S110) Obtaining a first image and a second image of a sample for correction; (S120) Matching first and second images; (S130) Obtaining a position relation between a first image and a second image; (S140) Generating combined height information